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Signal amplification, operational amplifiers (TIA, differential), and switched-capacitor circuits.
This section covers how mechanical energy is converted to electrical energy (and vice versa).
Remember: In MEMS, the first run usually stiction-fails. The second run, if you follow Kaajakari’s design rules, will vibrate.
For example, when discussing the resonant frequency of a comb drive, Kaajakari doesn't just give you the formula; he shows you how changing the finger overlap or the gap spacing affects your actuation voltage and shock tolerance.
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A z-axis accelerometer, range ±2g, sensitivity 1 mV/g.